![]() MEASURING DEVICE AND METHOD FOR THICKNESS MEASUREMENT OF A TAPE
专利摘要:
公开号:AT510009A4 申请号:T2022011 申请日:2011-02-16 公开日:2012-01-15 发明作者:Bernd Kolmanz;Alexander Magrutsch 申请人:Thomastik Infeld Ges M B H; IPC主号:
专利说明:
«· Fc * k · * 4 t * ft < + »·» 1 * 1 «· • * * · ft k 1 32728 / mo The invention relates to a measuring device according to the preamble of claim 1. There are measuring devices for measuring the thickness of tapes are known, in which a band between a sensor and a support is performed. A disadvantage of the known measuring devices is that especially at thicknesses in the range below 2000pm large Measurement inaccuracies in relation to the band thickness occur. The object of the invention is therefore to provide a measuring device of the type mentioned, with which the mentioned disadvantages can be avoided, with which a high accuracy for tapes, plates, wires or the like can be achieved with thicknesses below 2000pm and simply a statement about the quality the measurement results is possible. This is achieved by the features of claim 1 according to the invention. This has the advantage that a largely friction-free mounting of the sensor is achieved and the thickness of the tape can be determined with great accuracy. Furthermore, a good centering of the measuring tip can be ensured, whereby the accuracy can be further increased. It is further advantageous that the temperature of the sensor can be kept substantially constant, preferably with a temperature-stabilized fluid, and measurement errors due to thermal expansions can be avoided. The invention further relates to a method according to claim 12. The method steps of claim 12 correspond analogously to the features of claim 1, wherein an analogous object is achieved. The subclaims relate to further advantageous embodiments of the invention. It is expressly referred to the wording of the claims, whereby the claims at this point by reference in the • · · * * «* * * * 4k ···· *» * 44 · 4 τ «4 · · (I i · Λ 4 «· ·« 4 f «* * • * * * · *« Description and are considered to be reproduced verbatim. The invention will be described in more detail with reference to the accompanying drawing, in which only a preferred embodiment is shown by way of example in elevation. FIG. 1 shows a first preferred embodiment of a measuring device 1 for measuring the thickness of a belt 2 with a support 4 comprising a measuring zone 3, with a sensor 6 movably mounted substantially normal to the support 4 by means of a bearing arrangement 5, the sensor 6 being a measuring tip 7 for cooperation with the support 4 in the measuring zone 3, and with a position sensor 8 for receiving the position of an indicator element 9 of the sensor 6, wherein the bearing assembly 5 is formed as a fluid bearing. This has the advantage that a largely friction-free mounting of the sensor is achieved and the thickness of the tape can be determined with great accuracy. Furthermore, a good centering of the measuring tip 7 can be ensured, whereby the accuracy can be further increased. It is also advantageous that the temperature of the measuring sensor 6 can be kept essentially constant and measurement errors due to thermal expansions can be avoided. The measuring device 1 according to the invention is used primarily for measuring the thickness of a strip 2, but the application is not limited only to the thickness of a strip. The body to be measured may, for example, also be formed as a wire or as a plate or have any other shape which preferably at least partially comprises flat and / or substantially plane-parallel regions. A band has a longitudinal direction whose size is much larger compared to the cross-sectional dimensions of a cross section normal to the longitudinal direction. A plate has an area whose thickness is much smaller compared to the dimensions of the area. The body to be measured can be made of metal, plastic or ceramic. In particular, bodies of metal can be measured. For a concise and clear formulation, the body whose thickness is to be measured is referred to as Band 2 in a sequel. The measuring device 1, the first preferred embodiment of which is shown in the FIGURE, has a support 4, comprising a measuring zone 3, with a sensor 6 movably mounted in a manner substantially normal to the support 4 by means of a bearing arrangement 5, the sensor 6 providing a support Measuring tip 7 has to interact with the support 4 in the measuring zone 3. In the thickness measurement, the band 2 is arranged between the measuring tip 7 and the support 4. The support 4 preferably has a substantially planar surface. It can preferably be provided that a transport device for transporting the band 2 is provided on the support 4. As a result, the thickness of the strip 2 can be measured along its longitudinal axis in an advantageous manner. In this case, the thickness of the belt 2 can be continuously measured and checked, in particular during a running production process. The transport device can be arranged, for example, directly on the measuring device 1. The transport device can also be designed as an independent of the measuring device 1 assembly. The measuring device 1 can also be used for measuring the thickness of a stationary body. It can be provided that the measuring device 1 is moved. It can be provided that at least one guide roller 15 is arranged for guiding the band 2 on the support 4. In this case, the guide roller 15 may have a width adjustable to the width of the belt 2 gap, in which the belt 2 can be performed. By a lie on the belt 2 at the gap base can be ensured a three-sided guidance of the belt 2, which simply a predetermined movement of the belt 2 on the support 4 and in particular in the measuring zone 3 can be easily achieved. According to the preferred embodiment may further be provided that at least one counter-roller 16 for cooperation with the at least one guide roller 15, for vertical guidance of the belt 2, is provided. The counter-roller 16 is preferably designed such that the belt 2 is pressed by the counter-roller 16 against the guide roller 15. As a result, disturbing movement components of the band 2 can be calmed and it can be ensured that the band 2 remains in the guidance of the guide roller 15. As a result, the thickness of the strip 2 can also be measured at high speed, for example greater than 250 m / min, preferably greater than 500 m / min, in particular greater than 750 m / min. Furthermore, this can damage the measuring device 1 can be prevented by an uncontrolled movement of the belt 2. According to the first preferred embodiment it is provided that on both sides of the support 4 each at least one of the guide rollers 15 and one of the counter-rollers 16 is arranged, wherein in the region of the support a moving belt 2 can be reliably guided along a predetermined trajectory. It can preferably be provided that a rotating element 12 with guides 13 for lateral guidance of the band 2 is arranged around the measuring zone 3. Thereby, a movement of the tape from the measuring zone 3 can be prevented and the reliability and accuracy of the measurement result can be improved. According to the first preferred embodiment, the rotary element 12 comprises two guides 13, which are arranged centrally near the measuring zone 3 at two opposite points. The band 2 can be guided between the guides 13, wherein a lateral displacement of the band 2 is prevented by the guides 13. The guides 13 according to the first preferred embodiment are formed as pins and protrude parallel to the axis of rotation of the rotary member 12 on the support 4 forth. By rotating the rotary element 12 according to the first preferred embodiment, the guides 13 can be adapted to different widths of the belt 2, wherein the belt 2 is guided exactly and centered through the measuring zone 4. According to the first preferred embodiment it can be provided that the support 4 is arranged height-adjustable with respect to the guide roller 15. As a result, the position of the support 4 to the belt 2, and thus the distance between the support 4 and 2, or the pressure of the belt 2 on the support 4 can be specified. ♦ · 5 Furthermore, it can be provided that the measuring zone 3 is vertically adjustable solely in relation to the guide roller 15. In this case, the measuring zone 3 can be adjusted independently of the area of the support 4 surrounding the measuring zone 3. To be particularly advantageous has been found that the height of the support 4 is selected such that the belt 2 touches the support 4 so that the distance between the support 4 and 2, and the pressure of the belt 2 on the support 4 is minimal , This measurement errors and heavy wear of the support 4 can be avoided. Preferably, the support 4 in the measuring zone 3 consists of a material which is very hard and therefore unyielding, has a low coefficient of friction and a low coefficient of thermal expansion. The support 4 in the measuring zone 3 may for example be made of metal, ceramics, gems, z. As diamond, or suitable minerals, such as oxides or nitrides, with crystalline or amorphous crystal structure may be formed. As a result, a good measurement accuracy can be achieved. Furthermore, the wear is kept low by the choice of a hard material, whereby a longer maintenance interval can be selected. It can preferably be provided that the measuring zone 3 of the support 4 is translucent, in particular transparent. This makes it possible to check whether the band 2 is in the measuring zone 3 and / or the thickness of the band 2 is measured at the desired position or line. Preferably, the support 4 is made of a wear-resistant material with a low thermal expansion. According to the first preferred embodiment, it may further be provided that an optical device 17, in particular a lens, is arranged below the support 4. Thereby, the position of the belt 2 in the measuring zone 3 can be determined with high accuracy, avoiding the danger of systematic measurement error due to poor positioning. According to the first preferred embodiment, it may further be provided that a mirror 18 is arranged below the optical device 17. This mirror is preferably set such that the Position of the band 2 in the measuring zone 3 is clearly visible from the outside. This allows a quick and easy check of the position of the belt 2 in the measuring zone 3 from the outside. But it can also be provided that an image processing system, such as a camera with a CCD chip, below the support 4 or the optical device 17 is arranged. As a result, a constant monitoring of the position of the belt 2 in the measuring zone 3 can be carried out and, for example, forwarded to a computer with an image recognition program, whereby, for example, the position of the belt 2 in the measuring zone 3 can be readjusted automatically, or the measurement can be automatically stopped, when the tape 2 is outside a predetermined position. The thickness of the strip 2 causes the position of the measuring sensor 6, whose measuring tip 7 is in contact with the strip 2, to change. According to the first preferred embodiment, it is provided that the measuring sensor 6 is designed as a measuring rod 11. Thereby, a direct relationship between the thickness of the belt 2 and the vertical position of the sensor 6 is achieved. The Aufliegekraft with which the sensor 6 rests with its measuring tip 7 on the belt 2, is preferably the gravitational force. As a result, this bearing force remains constant, regardless of the thickness of the band 2, whereby an accurate measurement is possible regardless of the thickness of the band 2. The minimum Aufliegekraft depends on the weight of the sensor 6. As a result, an accurate measurement with simultaneous low wear of the support 4 and / or the measuring tip 7 can be achieved. In this case, the Aufliegekraft be chosen so large that the bearing of the tape is guaranteed and a negative effect on the measurement result is avoided. In other embodiments, it may be provided that the support force or at least part of the support force is applied magnetically, mechanically and / or fluidically. Preferably, it can be provided that the sensor 6 has a diameter of Mess * * «· k · · · · · * * * * * * * * * * * *........... ♦ · * · 7 Recording for additional weights has. Thus, the Aufliegekraft can be easily and quickly adapted to the respective conditions. It is preferably provided that the sensor 6 is formed of a rigid material with low thermal expansion. For example, the sensor 6 may be made of metal, stone, diamond, ceramics, minerals with crystalline or amorphous crystal structure, plastic, glass fiber composites, carbon fiber composites or other composite materials. By a low thermal expansion, and / or a great dimensional stability of the sensor 6, an accurate measurement can be achieved. Furthermore, it is preferably provided that the measuring rod 11 and the measuring tip 7 are formed in two pieces. As a result, the measuring rod 11 and the measuring tip 7 may be formed of different materials, for example, the material of the measuring rod 11 has a low thermal expansion, and the material of the measuring tip 7 has a low wear. It is preferably provided that the measuring tip 7 is formed of a hard, wear-resistant material, which has a low friction. For example, the measuring tip 7 may be made of metal, stone, diamond, ceramic, suitable minerals with crystalline or amorphous crystal structure. As a result, the wear is kept low, whereby for a long time constant measurement conditions can be achieved, and also a large maintenance interval is possible. Due to the low friction further low frictional heat is released, whereby the measurement can be carried out over a long period of time at substantially constant conditions. As a result, the thickness of the band 2 can often, and / or continuously be determined. The geometry of the measuring tip 7 is further preferably adapted to the conditions, for example to an approximate point contact of an approximate line contact or an approximate surface contact. Furthermore, the measuring tip 7 is preferably fixedly connected to the measuring rod 11. This fixed connection can be made, for example, positively, frictionally, non-positively or by an adhesive connection. In order to determine the position of the measuring sensor 8, a position sensor 8 for receiving the position of an indicator element 9 of the measuring sensor 6 is provided. Preferably, the position sensor 8 receives the position of the indicator element 9 without contact. The indicator element 9 can, as shown in the figure, be arranged at the upper end of the sensor. As a result, a simple measurement is possible, wherein the indicator element 9 does not hinder the handling of the sensor 6. Alternatively, however, the indicator element can also be arranged in the region of the measuring tip 7. As a result, the influence of the thermal expansion of the measuring sensor 6 on the measurement result can be kept particularly low. The position sensor 8 may, for example, interact with the indicator element 9 via a magnetic or electrostatic force, or the position sensor 8 and the indicator element 9 may be constructed as a capacitive element, wherein the capacitance is changed by changing the position of the indicator element 9 to the position sensor 8. For example, the position sensor 8 may be designed as a capacitive system, preferably as a capacitive distance sensor. As a result, a high clock rate and a high resolution can be achieved. Alternatively, the position sensor 8 may also be formed as an eddy current distance sensor. This also allows a high resolution can be achieved, this sensor is particularly insensitive to temperature fluctuations and pollution. Furthermore, the position sensor 8 can also be designed as a radar distance sensor or as a magneto-inductive distance sensor. Also, the position sensor 8 may be formed as an ultrasonic sensor with a sonic nozzle. As a result, an accurate measurement can be achieved with a simultaneously large measuring range. Preferably may further be provided, the position sensor 8 is formed as an optical system. As a result, the movement of the measuring sensor 6 can take place independently of the position sensor 8, with it being possible in particular to prevent the force effects influencing the measurement result from the position sensor 8 on the measuring sensor 6. Furthermore, the freedom of movement of the measuring sensor 6 is not restricted by the position sensor 8. For example, the position sensor 8 may be designed as a confocal sensor. As a result, a high resolution can be achieved, wherein the confocal sensor advantageously has a linear relationship between measured variable and position of the indicator element 9. Also, the position sensor 8 may be formed as a chromatic confocal sensor. This offers the highest resolution and requires no moving parts. The position sensor 8 can also be designed as an infrared distance sensor. As a result, a large measuring range can be achieved. For example, the position sensor 8 may be designed as a laser triangulation sensor. As a result, a large measuring range can be achieved with simultaneously high resolution. Furthermore, the position sensor 8 can also function on the principle of interferometric submicrometer measurement technology. As a result, highest resolutions can be achieved. Also, the position sensor 8 can operate on the principle of the optical shadow. This is the Indicator element 9 between a light source and a light sensor. By evaluating the shadow cast, the position of the indicator element 9, and thus the distance between the support 4 and the measuring tip 7, can be determined precisely. Preferably, it can further be provided that the Position sensor 8 has a second sensor which measures the distance between the position sensor 8 and support 4. As a result, the error which arises from the fact that the frame, on which the position sensor 8 is arranged, expands due to the temperature, can be determined and corrected. Furthermore, the thermal expansion of this frame can be determined by means of a strain measurement, for example with a strain gauge 10 will be. To reduce the thermal expansion of the frame, the frame can be tempered for the duration of the measurement. Preferably, it is further provided that position sensor 8 and indicator element 9 are surrounded by a housing 19. As a result, a fault of the position of the indicator element 9 is prevented by foreign objects, such as dust, metal dust, corundum, moisture or scattered light. In the measuring device 1 it is provided that the bearing assembly 5 is formed as a fluid bearing. It has been shown that this allows a particularly high accuracy of measurement can be achieved. The fluid bearing can be operated in particular with a temperature-stabilized fluid. In this case, the temperature of the measuring sensor 6 can be kept substantially constant by means of the fluid. In particular, a rapid response of the sensor 6 can be ensured thereby, wherein the force with which the sensor 6 rests on the belt 2 can be freely selected in a large range. The sensor is mounted in the bearing assembly 5 substantially normal to the support 4 movable. It is preferably provided that the bearing assembly 5 is designed as a static sliding bearing. A static sliding bearing is a sliding bearing, in which the fluid is pressed from the outside under pressure into the gap between the sensor 6 and the bearing assembly 5. As a result, a largely friction-free mounting of the measuring sensor 6 can be achieved. Preferably, the thickness of the gap between the sensor 6 and the bearing assembly 5 is very small. As a result, an accurate positioning of the sensor 6 can be achieved. In this case, a liquid, in particular a temperature-stabilized liquid, for example lubricating oil or water, or a gas, in particular a temperature-stabilized gas, for example nitrogen, noble gases, air, in particular dried air, can be used as the fluid. »* · 11 In other embodiments, it may also be provided that the fluid bearing is formed as a dynamic sliding bearing, wherein there is a friction-reducing effect of the fluid by a specific rotation of the measuring sensor 6 in the bearing assembly 5. It is particularly preferred that the fluid bearing is a gas bearing, in particular an air bearing. As a result, a largely friction-free mounting of the measuring sensor 6 and thus high measuring accuracy of the measuring device 1 can be achieved. Furthermore, this eliminates the risk that an escaping liquid contaminates the measuring device 1, falsifies the measurement result, and / or damages the measuring device 1 or a subsequent device in the production process of the strip 2. Preferably, it is further provided that the gas to be used is air, in particular dried air. This eliminates the need to recycle the gas used and transported away. Particularly preferably, it can be provided that the air to be used, in particular dried air, is temperature-stabilized. Thereby, the temperature of the sensor 6 can be kept substantially constant, whereby measurement errors, which have their origin in the thermal expansion, can be kept low. The fluid can be introduced through a plurality of fluid channels in the gap between the sensor 6 and bearing assembly 5. It is preferably provided that the fluid bearing comprises a porous material, in particular a porous sintered material, for fluid guidance. As a result, a very uniform static pressure for the storage of the sensor 6 can be achieved, whereby a tilting of the sensor 6 can be prevented. Preferably, it is further provided that the angle of rotation of the measuring sensor 6, therefore in a rotation about the longitudinal axis of the sensor, can be predetermined or controlled. If the measuring tip 7 is arranged, for example off-center of the axis of rotation, a fine adjustment of the position of the measuring tip 7 on the belt 2 can be carried out by a targeted rotation of the sensor 6. With continuous rotation of the sensor 6, not only the thickness along a line of the belt 2 can be determined, but by a sinusoidal course of the measuring points on the belt 2 also further statements about the shape of the belt 2, for example, a curvature, are made. A control of the angle of rotation of the sensor 6, for example, can be done directly on the sensor via, for example, magnets. Furthermore, however, it is also possible to control the angle of rotation of the measuring sensor 6 via a rotational movement of the bearing arrangement 5. The position of the measuring transducer 6 can be specified in a particularly simple manner if the cross section of the measuring transducer 6 is not rotationally symmetrical, for example oval or polygonal, in particular quadrangular. With these sensors 6 can be easily ensured that the sensor 6 follows the rotational movement of the bearing assembly 5. For the controlled raising and lowering of the measuring sensor 6 on the belt 2, it is preferably provided that the measuring device 1 comprises a lifting device 20. Preferably, this lifting device 20 is designed as a piston with an extension which is vertically movable and abuts on an extension of the measuring sensor 6 from below to lift the sensor 6 on this extension. In this case, the sensor 6 is only on the force of its own weight on the lifting device 20. This allows the sensor 6 controlled on the belt 2 and are set off, causing damage can be avoided. It is preferably provided that the bearing assembly 5 is movable substantially parallel to the support 4 by means of a movement device. Thereby, the zero point of the measuring device 1 can be easily checked by the sensor 6 is placed on the support 2 next to the belt 2, even if the belt 2 is still moving. Furthermore, it is preferably provided that the movement device is electronically controllable. As a result, the checking of the zero point position can be carried out automatically at predefinable times, and / or if certain predefinable conditions are met. This ensures a reliable measurement over a longer period of time. * · * «13 It is preferably provided that the movement device is formed so precisely that the position of the band 2 at which the thickness is measured, can be predetermined. In particular, it can be provided that the thickness of the band 2 is measured along a sinusoid. As a result, further knowledge about the shape of the band 2 can be obtained. Furthermore, it can preferably be provided that only the bearing arrangement 5 can be moved by the movement device. Thereby, the mass to be moved can be kept low, whereby an accurate positioning of the bearing assembly 5 is possible. With a suitable choice of the support 4, the sensor 6, the bearing assembly 5, as well as control or consideration of various sources of error, such as thermal expansion, the resolution of the measuring device 1 in the nanometer range, for example 100 nm, in particular 10 nm. According to one embodiment of the invention it is provided that the support 4 and the bearing assembly 5 are mounted relative to the guide roller 15 slidably. As a result, both the support 4 and the bearing assembly can be removed from the belt 2, for example, to undertake maintenance without hindering an ongoing production process. Preferably, the support 4 and the bearing assembly 5 are arranged on a common guide element, wherein the movement of the support 4 and the bearing assembly 5 takes place together and is substantially normal to the direction of movement of the sensor 6 in the bearing assembly 5. Furthermore, it can be done substantially normal to the direction of movement of the belt 2. The invention further relates to a method for measuring the thickness of a strip 2, wherein the strip 2 is arranged on a support 4 comprising a measuring zone 3, of a substantially perpendicular to the support 4 by means of a trained as a fluid bearing bearing assembly 5 movably mounted sensor 6, the tape. 2 is pressed against the measuring zone 3, whereby a measuring tip 7 of the measuring sensor 6 is held in contact with the tape 2, the position of an indicator element 9 of the measuring sensor 6 is recorded by a position sensor 8, and from the data of the data. · 14 Positionsaufnehmers 8 the thickness of the belt 2 is determined. As a result, the advantages mentioned in the introduction can be achieved. This has the advantage that the thickness of the belt 2 can be determined with great accuracy because of the largely friction-free mounting of the sensor 6. Furthermore, a good centering of the measuring tip 7 can be achieved thereby, whereby the measurement error is kept low. It is also advantageous that a substantially constant cooling of the measuring sensor 6 is achieved by the fluid bearing, whereby errors due to thermal expansions will be kept low. Further embodiments according to the invention have some of the features described, wherein the first-in-first-flow is also particularly described by embodiments which are not intended to be exhaustive. claims:
权利要求:
Claims (14) [1] 15 15 Dl DR. FERDINAND GIBLER DR DR. WOLFGANG POTH Austr'an and European Patent and Trademark Attorneys GIBLER & POTH PATENTANWÄLTE 32728 / pt PATENT CLAIMS 1. Measuring device (1) for measuring the thickness of a strip (2) having a measuring zone (3) Support (4), with a substantially normal to the support (4) by means of a bearing assembly (5) movably mounted sensor (6), wherein the sensor (6) has a measuring tip (7) for cooperation with the support (4) in the Measuring zone (3), and having a position sensor (8) for receiving the position of an indicator element (9) of the measuring sensor (6), characterized in that the bearing arrangement (5) is designed as a fluid bearing. [2] 2. Measuring device (1) according to claim 1, characterized in that the fluid bearing is a gas bearing. [3] 3. Measuring device (1) according to claim 1 or 2, characterized in that the fluid bearing comprises a porous material for fluid guidance. [4] 4. Measuring device (1) according to one of claims 1 to 3, characterized in that the measuring sensor (6) is designed as a measuring rod (11). [5] 5. Measuring device (1) according to one of claims 1 to 4, characterized in that the sensor (6) has a receptacle for additional weights. [6] 6. Measuring device (1) according to one of claims 1 to 5, characterized in that the measuring zone (3) of the support (4) translucent, in particular transparent, is formed. · «# * * ·» ······························································································. ··· · · 16 [7] 7. Measuring device (1) according to one of claims 1 to 6, characterized in that the position sensor (8) is designed as a capacitive system. [8] 8. Measuring device (1) according to one of claims 1 to 7, characterized in that the position sensor (8) is designed as an optical system. [9] 9. Measuring device (1) according to one of claims 1 to 8, characterized in that arranged around the measuring zone (3) is a rotary element (12) with guides (13) for laterally guiding the strip (2). [10] 10. Measuring device (1) according to one of claims 1 to 9, characterized in that the support (4) is arranged vertically adjustable. [11] 11. Measuring device (1) according to one of claims 1 to 10, characterized in that the bearing arrangement (5) is movable substantially parallel to the support (4) by means of a movement device. [12] 12. Measuring device (1) according to one of claims 1 to 11, characterized in that at least one guide roller (15) is provided, wherein the guide roller (15) for guiding the tape (2) on the support (4) is formed, and in that the support (4) and the bearing arrangement (5) are displaceably mounted relative to the guide roller (15). [13] 13. Measuring device (1) according to claim 12, characterized in that the measuring zone 3 is height-adjustable solely in relation to the guide roller 15. [14] 14. Method for measuring the thickness of a strip (2), wherein the strip (2) is arranged on a support (4) comprising a measuring zone (3) from a substantially normal position to the support (4) by means of a bearing arrangement ( 5) movably mounted sensor (6) against the tape (2) against the «*» * * * + * · «· ft ** · ♦♦♦ · · · · · · · · ···« · * 4 • * * * * ft ft * * ft * * ft * + m * # *· ft * * «* 17 the support (4) in the measuring zone (3) is pressed, one measuring tip (7) of the sensor (6) is held in contact with the belt (2), the position of an indicator element (9) of the sensor (6) is recorded by a position sensor (8), and the thickness of the belt is obtained from the data of the position sensor (8) (2) is determined. Ly /. < f, Gibler & Poth Patent Attorneys OG (Dr. F. Gibler or Dr. W. Poth)
类似技术:
公开号 | 公开日 | 专利标题 EP2697600B1|2017-11-01|Apparatus and method for measuring the thickness of a measurement object DE10313038B4|2005-02-17|Device for detecting the position of a probe element in a multi-coordinate measuring device DE1773712A1|1972-01-13|Measuring device DE102007001620B4|2009-08-20|Method for operating a processing machine and tool holder DE112017004821T5|2019-06-13|Device for measuring the thickness of a wafer carrier DE3929629A1|1991-03-07|LENGTH OR ANGLE MEASURING DEVICE AT510009B1|2012-01-15|MEASURING DEVICE AND METHOD FOR THICKNESS MEASUREMENT OF A TAPE DE19511939C2|2000-05-18|Sensor for non-contact thickness measurement on foils DE2332670C3|1979-02-15|Testing device for testing the flatness and squareness of workpiece surfaces EP3225320B1|2020-07-15|Device and method for measuring the straightness of a rod-shaped workpiece EP0214500A1|1987-03-18|Surface-testing device EP2839951B1|2018-11-21|Method for producing a web of corrugated cardboard that is laminated on at least one side EP0524218A1|1993-01-27|Thickness gauge. EP3548866B1|2020-06-17|Measuring system, measuring arrangement and method for determining measuring signals during a penetration movement of a penetration body into a surface of a test body EP3023742B1|2017-01-11|Assembly comprising a measurement scale attached to a support DE102018204016A1|2018-09-20|PROFILE MEASURING MACHINE DE2238509A1|1973-02-15|HYDRAULIC PRESS AND PROCEDURE TO YOUR OPERATION EP3152515B1|2019-05-08|System and method for measuring a dimension of a workpiece DE2800340C2|1984-10-31|Adjustment device, in particular for optical measurements DE102012205184A1|2013-10-02|Measurement device for measuring e.g. outer diameter of bearing ring of rolling bearing, has support comprising support surface, and adjusting unit for adjusting angle that is included between carrier element and horizontal direction DE102008000105B4|2010-11-11|coordinate measuring machine DE102016207593A1|2016-11-10|Apparatus and method for measuring the width and thickness of a planar object AT513766B1|2015-03-15|Method for measuring the thickness of wide films DE102013106059A1|2014-12-11|Coordinate measuring device for measuring workpieces DE102008010559B4|2011-03-31|Device for calibrating an optically operating sensor
同族专利:
公开号 | 公开日 US20130042705A1|2013-02-21| AT510009B1|2012-01-15|
引用文献:
公开号 | 申请日 | 公开日 | 申请人 | 专利标题 GB1531776A|1975-06-13|1978-11-08|Secim|Checking the flatness of sheet metal| DE3006489A1|1980-02-21|1981-08-27|Dr. Johannes Heidenhain Gmbh, 8225 Traunreut|LENGTH OR ANGLE MEASURING DEVICE|DE102014204029B4|2014-03-05|2020-01-09|Bundesrepublik Deutschland, vertr. durch das Bundesministerium für Wirtschaft und Energie, dieses vertreten durch den Präsidenten der Physikalisch-Technischen Bundesanstalt|Membrane Thickness Gauge|US3194055A|1963-05-06|1965-07-13|Knobel Max|Work dimension and position detecting, indicating and controlling method and apparatus| US3307266A|1965-03-11|1967-03-07|Brauson Instr Inc|Method and apparatus for measuring the thickness of a laminar layer| US4292838A|1979-11-26|1981-10-06|Measurex Corporation|Caliper gauge for the measurement of sheet members over a wide range of thicknesses| US5305646A|1992-02-03|1994-04-26|Dana Corporation|Gauge for compressible medium| DE102005034515B4|2005-07-20|2019-06-19|Immobiliengesellschaft Helmut Fischer Gmbh & Co. Kg|Measuring stand for holding a measuring device| US8520222B2|2011-11-08|2013-08-27|Strasbaugh|System and method for in situ monitoring of top wafer thickness in a stack of wafers|FR3020137B1|2014-04-22|2016-05-13|Msc & Sgcc|DEVICE FOR DIMENSIONALLY CONTROLLING CONTAINERS BY OPTICAL DETECTION WITHOUT CONTACT| CN112099111A|2020-09-21|2020-12-18|航天新气象科技有限公司|Calibration device and calibration method|
法律状态:
2016-10-15| MM01| Lapse because of not paying annual fees|Effective date: 20160216 |
优先权:
[返回顶部]
申请号 | 申请日 | 专利标题 AT2022011A|AT510009B1|2011-02-16|2011-02-16|MEASURING DEVICE AND METHOD FOR THICKNESS MEASUREMENT OF A TAPE|AT2022011A| AT510009B1|2011-02-16|2011-02-16|MEASURING DEVICE AND METHOD FOR THICKNESS MEASUREMENT OF A TAPE| US13/397,310| US20130042705A1|2011-02-16|2012-02-15|Measuring apparatus| 相关专利
Sulfonates, polymers, resist compositions and patterning process
Washing machine
Washing machine
Device for fixture finishing and tension adjusting of membrane
Structure for Equipping Band in a Plane Cathode Ray Tube
Process for preparation of 7 alpha-carboxyl 9, 11-epoxy steroids and intermediates useful therein an
国家/地区
|